Yesterday, FIB was reported to have a problem. I believe that LMIS run out. I ordered the parts last week, waiting for the parts. A service call was placed. FEI engineer will be on site tomorrow to check the system. Meanwhile, we are working on getting the parts there quickly. Please check the comments for following up
Month: July 2013
EDS on quanta 3D SEM down on July 18 and up on 10/7/2013
EDS on quanta 3D SEM was down yesterday. A brief check indicated that detector cooling has a problem. Am email has been sent to an Oxford engineer. Waiting for response…..
SBT Sputter Coater fixed
Engineer will be inspecting the instrument tomorrow at 11 am.
Amir