FEG was reported to shut down itself today. I tried to restart the emitter, but failed. I just sent an email to FEI engineer and will report to FEI service after the labor day.
Month: August 2013
Quanta 3D down on 8/20/2013 and up on the same day
A software issue showed up this morning. After working FEI engineer on the phone, the problem could not be solved. The engineer thought that there could be a hardware problem. A service call was placed. Waiting for a service from FEI.
UltimaIII is down on 8/16/2013 and up on 8/19/2013
The UltimaIII diffractometer is down due to the overcooling issue with the chiller. Mostly likely we need to replace the thermostat.
Chamber camera problem with Quanta 3D on 8/15/2013 and up on 8/16/2013
Chamber camera in Quanta 3D SEM lost contract yesterday evening. The problem was not solved by following FEI engineer’s advice. I have placed a service call to FEI. Waiting for an on-site visit.