Quanta 3D: SEM OK, FIB scanning issue on 2/24/2014 and solved on 3/3/2014

Quanta 3D SEM is working well. FIB may have an issue with patterning under some conditions because the scanning part is not fully functional.

We have changed the LMIS and FIB apertures and done an alignment. We are waiting for the scanning parts which may arrive on next Monday.

CM-20 TEM: Major service on 3/3/2014 and completed on 3/11/2014

TEM users:

This is to inform you that the major TEM maintenance service is postponed to next Monday (3/3/2014). As I indicated in my last email, the maintenance could last for two weeks or longer, so please finish any urgent work this week. When you have any problem to obtain high quality images/diffraction patterns, please contact me. I will keep you posted  for any progress on this blog.

Thanks, Jian-Guo