The engineer recommended a new process for cleaning the guns. All the 4 guns that we have will be cleaned and checked in 1-2 days. I will update you when the instrument will be ready.
Thanks,
Amir
Calit2 Sputter Coater Down on 9/15/2014( Fixed 9/19/2014)
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Both guns were cleaned and new parts have been installed. I have checked their operation again today at 1 pm, and they were working fine.
Amir