CM-20 TEM was down because of water leakage in the chiller and pipes of the TEM. Chiller water pump, a valve and leaking pipes were changed on 4/13/2015, but new leaking area was found again today. FEI engineering is fixing it now. Because the pipes are very old, I asked the engineer to replace the old pipes with new ones. This problem may occur again. Please report any water leakage immediately to prevent big problems from happening. Thanks!
CM-20 TEM down on 4/13/2015 and up on 4/16/2015
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The FEI enginner finished his work this afternoon. I tested the TEM and did an alignment. It is working now