A problem with Quanta 3D stage was reported today. I just checked the SEM and reported the problem to FEI engineer. One part could be out of order. FEI engineer will be on-site after the part is received. While waiting for the part, you may use it if you do not need to use stage rotation.
Thanks,
Jian-Guo
FEI engineer changed the cable. The stage is working well.