Quanta 3D SEM/FEB down on 3/22/2016 and up on 3/28/2016

Jian-Guo Zheng / March 24, 2016March 29, 2016 / Instrument Status

FEG will be replaced on 3/22/2016. It is expected that the SEM will be up by Friday 3/25/2015

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One Reply to “Quanta 3D SEM/FEB down on 3/22/2016 and up on 3/28/2016”

Jian-Guo Zheng says:

March 29, 2016 at 7:35 am

The FEG was changed. After baked out for a couple of days, the SEM was up yesterday. It has been running well.

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