Quanta 3D SEM is OK, but FIB has a problem with the LMIS. A service call has been placed. Waiting for FEI service…Current LMIS may be close to its life time. I have a new LMIS available. The service engineer may replace the LMIS immediately if necessary. I expect that the FIB will be fixed soon.
FIB problem on 4/23/2013 and fixed on 4/25/2013
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FEI engineer came in this morning and got the FIB up by noon. OK to use the FIB now.
FEI engineer came in this morning and replaced the LIMS. The system vacuum is being pumped down now…