Quanta 3D SEM/FIB is working. However, Quanta 3D ion beam image resolution is not as good as before. FEI engineer is trouble shooting to find the problem related part. This issue should not prevent users from using it. Please read comment for more updates.
Recent events: a leakage was found from Pt GIS. A new Pt GIS is installed today. The leakage problem is solved. A full FIB alignment was done last week.
FEI engineer replaced the Pt GIS and several ion beam control boards. The performance is greatly improved. He also changed the valve between the pump and chamber and solved a problem for low vacuum mode. He will be back tomorrow morning to have a final check on high ion beam current performance.