FEI Quanta 3D up on 1/25/2011

Jian-Guo Zheng / January 24, 2011January 26, 2011 / Instrument Status

The dual-beam instrument has a vacuum gauge problem today. Engineer will be on campus tomorrow.

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One Reply to “FEI Quanta 3D up on 1/25/2011”

Jian-Guo Zheng says:

January 26, 2011 at 8:59 am

Vacuum propblem was fixed yesterday. vCD detector is working, OK for basic SEM and FIB.

Need a new Pt GIS source. Beam deceleration needs more service

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