FEI Quanta 3D ion source was depleted on last Friday. FEI engineer will be on campus to install a new source and do all necessary alignment. All reservations on Monday will be cancelled. Please reschedule your sessions. Thanks
FEI Quanta 3D ion source changed
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FEI engineer finally obtained good vacuum on Monday. He did all alignment on Tuesday. The system has run for two days without any problem. Job well done!
FEI engineer changed the Ga ion source today. He could not recover the vacuum till a few minutes ago. He will be back tomorrow morning to condition and align the ion gun. You may use SEM this evening instead of FIB. I will have to cancel the sessions tomorrow morning. Thanks for your undertstanding.