The sputter coater is not operational and will require non-routine maintenance to fix it. South Bay Technology has been notified to the problem and will service it according to their availability.
2 Replies to “Sputter Coater: Down on 9/7 and up on 9/12”
Leave a Reply
You must be logged in to post a comment.
Since the repair of the sputter coater on Sept 7, the system has been running well. If the gun is not stable, you need to purge the gun for 5 minutes, that is, turning on the gas valve without high voltage. This sputter coater is designed for SEM specimen preparation, that is, it works well for thin film coating. You should use other coating machines for thick film coating. If you have to use it ocasionally, please let me know.
SBT technical director repaired the sputter coater today. The coater is under vacuum testing till tomorrow morning.