Due to the recent software upgrade conducted on the Quanta, the EDS system cannot acquire an image for use in Point&Shoot, Mapping, etc. You can still acquire an overall spectrum for the field of view that you are scanning with the SEM, but you won’t be able to sync it up with an image. Keep this limited capability in mind if you wish to use EDS. A call has been put into Oxford to correct this problem.
FEI Quanta EDS Capabilities Limited
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This issue has been fixed. EDS is back to operating fully and normally.