FEG was reported to shut down itself today. I tried to restart the emitter, but failed. I just sent an email to FEI engineer and will report to FEI service after the labor day.
Quanta 3D down on 8/31/2013 and up on 9/1/2013
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FEI engineer came today to fix the SEM. The SEM is working now. Users should not change SEM registry. Thanks,
Jian-Guo