A FIB problem was reported today. The ion source might run out. Contacted FEI engineer to schedule an on-site visit. The engineer contacted me this afternoon. Parts were ordered in advance. The engineer may be on campus tomorrow to install a new LIMS.
FIB problem on 11/6/2013 and fixed on 11/08/2013
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The FIB LIMS was aligned on last Friday. The system was used without any problem in last a few days. Job done!
The LIMS is installed today. The system is pumped down. Tomorrow, FEI engineer will align the FIB. I expect that both the FIB and SEM will be ready by 1:30pm tomorrow.