Sputter coater is down (fixed)

Amirhossein Khalaj Hedayati / February 11, 2014February 13, 2014 / Instrument Status

The problem started after the power failure. It is under investigation.

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One Reply to “Sputter coater is down (fixed)”

Amirhossein Khalaj Hedayati says:

February 13, 2014 at 8:28 pm

The Gun 2 was repaired the vacuum problem is also gun. If you see vacuum doesn’t reach the base pressure, use IPA and Kim wipe and clean around the edges of the door.

Happy Sputtering

Amir

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