Quanta 3D: SEM OK, FIB scanning issue on 2/24/2014 and solved on 3/3/2014

Jian-Guo Zheng / / Instrument Status

Quanta 3D SEM is working well. FIB may have an issue with patterning under some conditions because the scanning part is not fully functional.

We have changed the LMIS and FIB apertures and done an alignment. We are waiting for the scanning parts which may arrive on next Monday.

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One Reply to “Quanta 3D: SEM OK, FIB scanning issue on 2/24/2014 and solved on 3/3/2014”

  1. The scanning parts received and installed yesterday. The FIB is working well now.

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