The Magellan is down again due to alignment issues. The FEI engineer is running an alignment overnight and will be back in the morning to try and fix it.
Magellan Down on 4/30/14 and up on 5/2/2014
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FEI engineer did Magellan SEM alignment yesterday. I have solved quickloader problem.The SEM resolution was improved. The image may shift slightly when changing beam current. We are working on this issue. Before it is solved, EBL users may align the sample feature at different current before writing a pattern. The SEM is up.