Magellan SEM is Ok with field free lens, but the immersion lens has a problem on 5/5/2014. FEI engineer was informed. He will be on campus on 5/7/2014
Magellan SEM: Immersion lens problem on 5/5/2014 and fixed on 5/7/2014
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FEI engineer fixed the immersion lens problem yesterday. During his service, he found some materials on the pole-piece, which may caused the immersion lens problem. He also found a small dent on the pole-piece. To prevent the problem from occurring again, please make sure that a) you follow SOPs and your sample does not touch the pole-piece, b) if observing magnetic materials, you do not use immersion mode and the working distance is larger than 10mm.