Quanta 3D SEM/FIB was down this afternoon. The sample was drifting in SEM image and the touch alarm was on all times, even though the sample was not touching pole-piece. There could be a grounding issue. FEI engineer was contacted by email. Waiting for response.
One Reply to “Quanta 3D down on 6/8/2014 and up on 6/10/2014”
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Trouble-shooting with FEI engineer yesterday and found that a cable was broken. FEI engineer just fixed the problem. It is up now.