The Magellan is down because of an issue with the aperture homing mechanism. FEI has been contacted and the service engineer is expected to troubleshoot the issue on the 11th or 12th.
5 Replies to “Magellan Down on 12/10/14 and up on 12/19/2014”
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FEI engineer was up on last Fri afternoon. It has been working well.
FEI engineer installed the new FEG source and replaced the cable yesterday. The SEM was baked and pumped over night. The vacuum was good this morning. The new source is being conditioned now. Hopefully, we may get the beam this afternoon. Then aperture alignment and beam alignment will be done. If everything goes smoothly, the SEM could be up tomorrow.
The IGP was not working. FEI engineer believed that the cable was bad. A new cable is ordered. Meanwhile, the engineer ordered a new FEG source. It may arrive on Wed. So the SEM may be down for this week. You may use Quanta 3D for urgent work. Please let me know when you need any help.
FEI engineer received parts on FRI, changed the aperture and started to pump the column.
FEI engineer visited us today and found that the aperture hardware had a problem. He ordered new parts and will replace the old parts with new ones tomorrow.