Magellan SEM problem with immersion lens was reported on 1/02/2015. The SEM is working well with Field free lens. FEI service department was informed . Waiting for response
Magellan SEM problem with immersion lens on 1/02/2015 and fixed on 1/07/2015
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The immersion lens problem was fixed on 1/07/2015. It has been working well since then
FEI engineer came on Monday and did alignment. The problem remains. He will be back on Wed. Currently, the immersion lens has a problem at 10 and 15kV. Other kVs such as 5kV or below and 20 kV or above are working OK.