XL30 is down due to the vacuum leakage. FEI service was called….
The vacuum issue is solved and XL30 is up now…
XL30 SEM is down on March 23 and is up on March 24
////////Current news from IMRI facilities
//Current news from IMRI facilities
//XL30 is down due to the vacuum leakage. FEI service was called….
The vacuum issue is solved and XL30 is up now…