Quanta 3D Low vacuum mode problem was reported on 3/26/2015. Today, I checked the LVSEM mode and found out that the detector may be an issue.
FEI engineer has been reported. Waiting for response
Quanta 3D Low vacuum mode problem on 3/26/2015 and solved on 4/1/2015
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FEI engineer came this morning and checked the LVSEM. It is working now.