Magellan SEM has a problem. UC mode and KV below 5 are currently not available due to no image with VC0. As a possible source of these issues & interference, the FEG module will be changed. Currently, the FEG module is currently on backorder awaiting a more firm ETA. The SEM is still usable. I tested the SEM today. Here is my suggestion. if you want to get good SEM images, you may use following conditions: 10kV, 50pA, TLD and Immersion lens. For EBL, you may use the same condition as you normally use.
Magellan Problem on 11/2/2015
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FEI engineer changed FEG power supply on 11/13/2015. The SEM noise disappeared. I will check the SEM on Sunday (11/15/2015) to check other issues
We are still waiting for the new electron gun. Meanwhile FEI engineer is doing some more tests. In last weekend, FEI engineer remotely connected to Magellan microscope PC from Oregon and did a test.