No FIB emission on last Friday. FEI engineer is informed. He tested it and will continue working on it
FIB down (SEM OK) on 2/19/2016 and up on 3/2/2016
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FIB LMIS was replaced on 3/1/2016. FEI engineer did an alignment on 3/2/2016. It has been working well. From now on, you need to put the ion beam on sleep when you finish your experiment to save he LMIS.