The Ga source run out. The Tescan engineer is placing the Ga LMIS with a new one starting from yesterday. This normally takes for 2 days. The progress is good. so it might be done for 1.5 days this time.
2 Replies to “Tescan LMIS source replacement started on 1/24/2019 and up on 1/29/2019”
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Tescan SEM/FIB is up now.
The vacuum is not good enough to get beam back. It is necessary to pump over weekend. Please do not touch it till Monday