I was reported that the Quanta 3D had a FIB problem. I checked Quanta 3D this morning and found that SEM was OK, but the ion source was not operational now. I have contacted FEI engineer. Waiting for response now…
Quanta 3D has a FIB problem 9/10/2012 and fixed on 9/13/2012
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The new ion source has been installed and tested. It is fully up now.
The FIB was checked again. The ion source run out. A new ion source was ordered. It may arraive tomorrow.