Yesterday, FIB was reported to have a problem. I believe that LMIS run out. I ordered the parts last week, waiting for the parts. A service call was placed. FEI engineer will be on site tomorrow to check the system. Meanwhile, we are working on getting the parts there quickly. Please check the comments for following up
Quanta 3D FIB is down (SEM is OK) on July 28 and up on July 31
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FEI engineer did FIB alignment and also check SEM alignment. I just tested both e-beam, i-beam and Pt GIS. All of them are working well. The FIB is fully up and job done!
FEI engineer checked the FIB and confirmed that the LMIS run out today. He replaced the old source with a new one and started pumping. The IGP for ion column was in good vacuum just before I left the lab. I hope that FEI engineer could start to do alignment tomorrow