FIB was down in the evening of on 9/24/2014. FEI engineer is coming to fix it on 9.26/2014. The SEM will be down from tomorrow morning to Monday afternoon. Other functions of the SEM is still OK now. If you want to use SEM, EBSD and EDS, you can use it today.
One Reply to “FIB down on 9/24/2014 and up on Oct 1, 2014”
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FEI engineer replaced the LMIS on Oct 27 and pumped the ion column down in the weekend. He did a full alignment for FIB and SEM on Oct 29. The ion beam was not stable till Oct 30. The FIB and SEM were running well yesterday. OK to use the FIB now.