TEM was down yesterday. Mingje and I did trouble shooting on the phone, but could solve the problem. Today I checked more components. One board may be damaged. An on-site service request was placed on the phone. Waiting for service engineer to call me back.
TEM down on May 30 and up on June 3
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FEI engineer found the damaged part on Tuesday and replaced it with a new one on Thursday. The vacuum was recovered in the evening of Thursday. I conditioned the high voltage and aligned the beam this morning (June 3). Now the TEM is fully up. If there is any further issue, please let me know. Thanks!