Month: June 2014

Magellan SEM  users:

I was just reported that the glass lid of the Quickloader on Magellan SEM was broken. I am going to contact FEI and get the glass lid replaced. Before the lid is replaced, users should not touch the quickloader.

I have changed the SEM stage to a single stub holder. All SEM samples must be loaded from front door of the SEM till further notice. There is a SOP folder on the table as a reference. If you did not use the front door to load the sample, please contact me or Tim so that one of us may teach you and stay with you for your first time sample loading and unloading.

If you have any questions, please let me know.

Thanks,

Jian-Guo

I was reported that the Magellan SEM generated a cross-over alignment issue in the afternoon of last Friday. I just did an alignment and fixed the cross-over issue. I obtained good images at different kVs (tested at 1, 5, 10, 30kVs) with different detectors ( ETD and TLD) and lenses ( field free and immersion lens). So the SEM should be OK now.

When I was doing the alignment, I found that UC mode had a problem.  I could not get the beam in UC mode so I could not go through the complete alignment. Please do not use UC mode and you may have to spend a little more time for lens alignment and astigmatism correction as trained. I have contacted FEI engineer. He may come on Tuesday.

Please read the comments on LEXI blog for updates.

Thanks,

Jian-Guo

Quanta 3D SEM/FIB was down this afternoon. The sample was drifting in SEM image and the touch alarm was on all times, even though the sample was not touching pole-piece. There could be a grounding issue. FEI engineer was contacted by email. Waiting for response.