Month: February 2016

No FIB emission on last Friday. FEI engineer is informed. He tested it and will continue working on it

Problem:  The SEM does not reach vacuum regardless of how often it is vented and pumped.  An engineer will be contacted ASAP to resolve the issue.  Sorry for the inconvenience.

Problem: SEM signal is weak. Using big current together with ETD and field free mode, you get SEM reasonable good images (>20nm), but the image quality is not as good as before. Immersion mode is not working. Waiting for engineer to check