Quanta 3D issues on 3/11/2014

Quanta 3D SEM/FIB is working. However, Quanta 3D ion beam image resolution is not as good as before. FEI engineer is trouble shooting to find the problem related part. This issue should not prevent users from using it. Please read comment for more updates.

Recent events: a leakage was found from Pt GIS.  A new Pt GIS is installed today. The leakage problem is solved.  A full FIB alignment was done last week.

Quanta 3D: SEM OK, FIB scanning issue on 2/24/2014 and solved on 3/3/2014

Quanta 3D SEM is working well. FIB may have an issue with patterning under some conditions because the scanning part is not fully functional.

We have changed the LMIS and FIB apertures and done an alignment. We are waiting for the scanning parts which may arrive on next Monday.