Quanta 3D problem with image drift was reported on 9/19/2012. I have tested the SEM and seen the e-beam image draft. No image drift was seen on i-beam image. I have called FEI calling center to schedule a service.
Month: September 2012
TEM camera down on 9/19/2012 and up with a loaner camera on 10/2/2012
TEM camera was down this morning. No image can be shown on the computer monitor, even the TEM image is on the screen and TEM camera. I am contacting Gatan engineer to schedule an on-line test. In most cases, we have to ship the camera to Gatan factory for repair. I will keep you posted.
LEXI seminar 2: LEXI seminar 2-Introduction to FEI Quanta 3D FEG Dualbeam System
The 2nd LEXI seminar about Quanta 3D FEG dualbeam system will be held on Sept 21 (2-3pm) in 3008 Calit2 building. If you have not signed up, here is the link to the sign-up page:
https://docs.google.com/spreadsheet/ccc?key=0AlVa2cfmNf6XdEEtMmZqUnk4Sm5fUU5FdzN6NWRxcmc#gid=0
See you on this Friday.
Jian-Guo Zheng
XL-30 SEM down on 9/14/2012 and up on 9/17/2012
XL-30 SEM is down this afternoon because of a stage problem. FEI engineer will repair it on Monday.
Quanta 3D problem with FIB on 9/14/2012 and up on 9/17/2012
Quanta 3D has a problem in FIB ion pump. FEI engineer will be on campus for service on Monday.
Quanta 3D has a FIB problem 9/10/2012 and fixed on 9/13/2012
I was reported that the Quanta 3D had a FIB problem. I checked Quanta 3D this morning and found that SEM was OK, but the ion source was not operational now. I have contacted FEI engineer. Waiting for response now…
FEI Quanta 3D problems on 9/4/2012 and fixed on 9/6/2012
High vacuum and low vacuum modes are OK. No ESEM mode should be used till a new ESEM bullet is installed. We are waiting for parts now; FIB has a low milling rate. Engineer will check it soon. The order of new ion source is in progress.
CM-20 TEM down on 9/4/2012 and up on 9/14/2012
TEM shuts down intermittently, which started from yesterday. FEI engineer has been informed. He is scheduling a visit for Thurday or Fri.