Vacuum error was reported. I just checked the SEM. It seems that CCG1 was not functional. Informed FEI engineeer. Waiting for FEI response…
Quanta 3D is down on 7/28/2012
////Magellan is down on 7/28/2012
//It was reported that no signal was from ETD and TLD detector. I just checked the SEM. The SEM signal is very weak although the emission and SEM alignment looks fine. FEI engineer has been contacted. Waiting for FEI response.
Magellan Back Up, 1pm 7/27
//The stage problem has been fixed. The instrument should run as normal.
Magellan Down on 7/26/2012 and up at 1pm on 7/27/2012
//Stage error. Contacted FEI on-line assistance. The problem was not solved. An on-site serice request has been placed. Waiting for FEI service engineer contacting me to schedule the service.
Quanta 3D down on 7/4/2012 and up on 7/5/2012
//Water leakage was reported this morning. I found that the leakage was from a hose which connects the chiller and the SEM. Engineer will replace the hose tomorrow.
Magellan SEM down (7/3/2012 late afternoon) and up on 7/5/2012, More problems found on 7/6/2012 and fully up on 7/11/2012
//A user accidently turned off the SEM power at about 6:30pm on 7/3/2012. Vacuum was recovered after 1 hr, but there was no emission from the gun. FEI engineer will be on campus to reset the system in the morning of Thursday (7/5/2012).
Twin jet polisher has a problem on 7/2/2012 and solved on 7/10/2012
//Twin jet polisher has a problem. The electrolyte is leaking when the pump is on. Emailed the manufacturer. Waiting for response
TEM CCD camera down on 6/22/2012 and loaner camera installed on 7/2/2012 and our CCD camera up on 7/6/2012
//The CCD camera for CM-20 TEM installed on June 5 (after last repair) was down this afternoon (June 22). The camera has the same problem as that occurred in April. I have informed Gatan engineer. I am waiting for his response.
Magellen SEM down 6/10/2012 and up 6/21/2012
//On Jun 10, 2012, at 9:10 PM, “Jian-Guo Zheng” <jzheng@calit2.uci.edu> wrote to FEI engineer:
Hi, John:
Magellan SEM had problems during my vacation. Last Sunday, I noticed that no electron beam was observed at 1-2kV and SEM images were poor under other kVs. There was no way to do basic alignment. Last week, some progresses were made, but users were still experiencing difficulties. I checked the SEM yesterday (Saturday) and today. Here is the summary:
The SEM works well under following conditions: 10kV-30kV for field free lens It has problems under: 10kV-30kV for immersion lens (image focus drifting), 3-5kV for field free lens and immersion lens (bad lens alignment). 1-2kV for poor images.
I would appreciate it if you could help solve the problems as soon as possible. It is fine if you have to use the reserved slots this week.
Please let me know if I may help.
Thanks,
Jian-Guo
EDS for XL-30SEM was down on 4/24/2012 and up on 5/2/2012
//The EDS on XL-30 SEM was down on 4/24/2012. Thermo EDS engineer visited us on 4/26/2012 and found that the computer motherboard had a problem. This Dell computer is in warranty. Dell will send a new computer to us. Then the engineer will install EDS sofware.